JPH0114577Y2 - - Google Patents
Info
- Publication number
- JPH0114577Y2 JPH0114577Y2 JP1982190043U JP19004382U JPH0114577Y2 JP H0114577 Y2 JPH0114577 Y2 JP H0114577Y2 JP 1982190043 U JP1982190043 U JP 1982190043U JP 19004382 U JP19004382 U JP 19004382U JP H0114577 Y2 JPH0114577 Y2 JP H0114577Y2
- Authority
- JP
- Japan
- Prior art keywords
- conveyance
- pipe section
- pressure pipe
- linear motor
- transport
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Non-Mechanical Conveyors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19004382U JPS5995027U (ja) | 1982-12-15 | 1982-12-15 | 搬送装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19004382U JPS5995027U (ja) | 1982-12-15 | 1982-12-15 | 搬送装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5995027U JPS5995027U (ja) | 1984-06-28 |
JPH0114577Y2 true JPH0114577Y2 (en]) | 1989-04-28 |
Family
ID=30409573
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19004382U Granted JPS5995027U (ja) | 1982-12-15 | 1982-12-15 | 搬送装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5995027U (en]) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5003342B2 (ja) * | 2007-08-08 | 2012-08-15 | 株式会社Ihi | 搬送台車及び立体駐車場 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4825369A (en]) * | 1971-08-07 | 1973-04-02 | ||
JPS517804U (en]) * | 1974-07-05 | 1976-01-21 | ||
JPS5349547Y2 (en]) * | 1975-08-06 | 1978-11-28 | ||
JPS5375683A (en) * | 1976-12-17 | 1978-07-05 | Hitachi Ltd | Wafer transporting apparatus |
JPS5748520A (en) * | 1980-09-03 | 1982-03-19 | Shinko Electric Co Ltd | Stop method for carrier in conveyor |
-
1982
- 1982-12-15 JP JP19004382U patent/JPS5995027U/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5995027U (ja) | 1984-06-28 |
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